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高透过率、高分辨率纳米微探针的制备
Fabrication of Nano-Probes with High Transmissivity and High Resolution
【摘要】 介绍了一种用于近场扫描光学显微镜(SNOM)中的高透过率光纤探针的制作方法。采用氢氟酸腐蚀低掺杂的普通单模石英光纤,选取适当比例的腐蚀液,并通过激光消融的方法得到直径、圆锥角均十分理想、表面光滑的针尖,所获探针直径变化范围为80~200nm,锥度40°~81°,透过率3.5×10-3。
【Abstract】 A one-step technique of fabricating a high-transmission fiber probe for near-field scanning optical microscope(NSOM)is presented.A commercial single-mode silica fiber with a low GeO2-doped core was etched in hydrofluoric acid(HF).At a proper ratio of the etching solution,followed by laser ablation,smooth faced tip with satisfied cone angle and diameter was obtained.The tips diameters are 80~200 nm,and the taper angle are 40°~81°,transmission efficiency is 3.5×10-3.
【关键词】 近场扫描光学显微镜;
光纤探针;
化学腐蚀;
激光消融;
【Key words】 near-field scanning optical microscopy; fiber probe; chemical etching; laser ablation;
【Key words】 near-field scanning optical microscopy; fiber probe; chemical etching; laser ablation;
【基金】 国家自然科学基金资助项目(69877014);湖北省教育研究项目(2003298)
- 【文献出处】 微纳电子技术 ,Micronanoelectronic Technology , 编辑部邮箱 ,2006年08期
- 【分类号】TP21
- 【被引频次】4
- 【下载频次】137