【摘要】 具有特定功能或满足特定需要的复杂形状金属micro/meso结构器件的加工,是非硅基MEMS制造和微细加工领域的一项重要内容。论述了制造金属micro/meso结构器件的几种常用加工技术(精密机械加工技术、LIGA和LIGA-like技术、微细电火花加工技术、微细电解加工技术和选择性电沉积技术等)及其工艺进展,并分析了它们的优缺点。更多还原

【Abstract】 The fabrication of metal micro/meso-structures &-devices with some special function or meeting some special needs is an important task in non-Si-MEMS fabricating and micromachi-ning.Several useful microfabrication techniques were reviewed including ultraprecision machining,LIGA and LIGA-like,micro electrodischarge machining,micro electrochemical machining and selective electrodeposition for producing metal micro/meso-structures &-devices,and their advantages and disadvantages were analyzed.更多还原