【摘要】 碳化硅以其优异的电学、机械和化学性能成为极端条件下MEMS器件应用的首选材料。梳齿驱动器的固有频率是MEMS器件结构设计中的一个重要参数。采用有限元分析方法,对多晶SiC梳齿驱动器进行了模态分析,得到了前六个模态的固有频率,并与相同结构的硅基梳齿驱动器的固有频率进行了比较,计算结果与理论预言十分吻合。更多还原

【Abstract】 SiC is well known for its excellent electrical,mechanical,and chemical properties,making it an outstanding candidate as a structural material for MEMS in harsh environments.Finite element analysis techniques were used for modal analysis of poly-SiC comb-driver.The first six intrinsic frequencies and vibration modes of polycrystalline SiC comb-driver were gained.Compared with poly-Si comb-driver,the poly-SiC one always has a higher intrinsic frequency.The computational simulation results are consistent with theoretical prediction.更多还原