【摘要】 论述了MEMS波长可调谐激光器及其进展。介绍了几种不同类型的波长可调谐激光器,如基于表面微机械反射镜的MEMS可调谐激光器、基于深腐蚀圆形反射镜的MEMS可调谐激光器、基于闪耀光栅的MEMS可调谐激光器、基于阵列集成的MEMS可调谐DFB激光器和VCSEL基MEMS可调谐激光器。更多还原

【Abstract】 MEMS wavelength tunable lasers and its progress were preserted.Different kinds of wavelength tunable lasers were introduced,such as MEMS tunable laser based on surface-micromachined mirror,deep-etched circular mirror,blazed grating,array integration and VCSEL.更多还原