【摘要】 用原子力显微镜(AFM)研究了电场诱导氧化理论以及偏置电压和脉冲时间对加工结构尺寸的影响。通过实验得出了偏压、脉冲时间越大,加工尺寸越大的结论。并总结出氧化加工Si较好的参数范围。更多还原

【Abstract】 The theory of field-induced oxidation and the impact of bias voltage and pulse time on the nanofabrication were studied by AFM. According to the experiments, it is obvious that the bias voltage and pulse time are in direct proportion to oxide dimension. The proper bias voltage and pulse time range for oxidizing Si film were achieved.更多还原