节点文献
用于集成电路低压压敏陶瓷材料的研究
Research of Low Voltage Varistor Ceramic Material for IC
【摘要】 介绍了低压压敏陶瓷的导电机理、研究途径,实验并分析了掺入TiO2、籽晶和稳定剂Ta2O5对材料性能的影响及作用原理,做出了适合集成电路用的低压压敏陶瓷材料。
【Abstract】 The transmitting electric current mechanism and the development of low voltage varister ceramic were introduced. The experiments and analyzing on the mechanism of doping TiO2 to the material, affecting the material by the crystalline, grain, and a steady Ta2O5 chemical preparation were done. The low voltage varister ceramic material was successfully made for IC manufacturing.
【关键词】 低压压敏陶瓷;
晶粒;
晶界;
富铋相;
【Key words】 low voltage varister ceramic; grain; crystal interlayer; rich Bi layer;
【Key words】 low voltage varister ceramic; grain; crystal interlayer; rich Bi layer;
- 【文献出处】 半导体技术 ,Semiconductor Technology , 编辑部邮箱 ,2006年08期
- 【分类号】TM28
- 【被引频次】4
- 【下载频次】111