【摘要】 金刚石薄膜由于其极高的硬度和化学稳定性 ,并且透红外光特性和电阻率高的特性 ,广泛应用于机械、电子、光学、医学等领域。对采用氩氢等离子体电弧 (即上电极 )与碳氢化物在水冷成膜台 (即下电极 )上淀积金刚石膜的结构设计方案作较详尽的探讨 ,以物元分析法设计出较合理的传动方案 ,解决了工艺中的难题更多还原

【Abstract】 DF is widely used in machinery,electronics,optica and medical science due to yts high hardness,chemical stability,special characteristic of infrared penetration and high electrical resistance.This article gives a detailed account of the structure designing of depositing F on water_frozen film table(ie lower electrode) with plasma electric arc(ie upper electrode) and carbon_optical analysis,which enable to solve problems in process.更多还原