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喷镀法制备SnO₂膜导电玻璃的研究

Study on conductive glass with SnO₂ film by spray method

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【Author】 WANG De-miao 1, ZHU Yue-xiu 2 (1.Department of Electronic and Information, Zhejiang University,Hangzhou 310027, China 2.College of Information Science and Engineering, Wenzhou University, Wenzhou 325027, China)

【机构】浙江大学信电系；温州大学信息学院浙江杭州310027；浙江温州325027；

【摘要】用喷镀法将 Sn Cl4溶液喷射到预先加热的玻璃表面 ,制成了薄膜电阻 <70 Ω/□ ,透光率 >88% ,热稳定性 <45 %的 Sn O2 膜导电玻璃 ,研究了膜厚、基底温度、溶液组成对薄膜电阻与透光率的影响。更多还原

【Abstract】 The transparent and conductive glass with SnO₂ film by spray method has been obtained. The sheet resistance is less than 70Ω/□, the transmittance is greater than 88% and the hot stability is less than 45%. The effect of the film thickness, the substrate temperature and the composition on the sheet resistance and the transmittance is studied.更多还原