【摘要】 本文提出共面双栅极金刚石薄膜的场发射阵列阴极 (FEAs) ,它由平行的栅极、共面反射极和长条型的金刚石薄膜场发射体组成。采用PIC粒子模拟软件MAGIC模拟这种结构的电子轨迹、相空间图和发射电流 电压等特性 ,并与只有栅极时的情况进行对比 ,表明反射极对电子注有会聚作用 ,能形成层流性良好的电子注 ,该结构可应用于场发射平面显示器等真空微电子器件中更多还原

【Abstract】 The diamond film field emission arrays(FEAs),consisting of strip shaped planar emitters,parallel gates and anodes with and without in plane lens,have been simulated with the particle in cell(PIC) simulation code MAGIC.The electron beam streamlines,its distribution in the x v y phase space and the emission current voltage characteristics of the system with in plane lens were evaluated and compared with the results of the system without the in plane lens.We found that the in plane lens focuses the electron beam fairly well.更多还原