【摘要】 利用电弧离子镀 (ArcIonPlating)方法 ,通过对独立的Ti靶和Cr靶的弧电流进行控制 ,成功地在高速钢 (HSS)基体上制备了不同成分配比的 (TiCr)N薄膜。采用X射线衍射 (XRD)分析显示 :薄膜为单一的fcc的结构、没有TiN或CrN相存在 ;薄膜呈 (2 2 0 )结构 ,薄膜的晶格常数随着Cr含量的增加而减小。透射电子显微镜 (TEM)结果表明 :(TiCr)N薄膜的晶粒尺度为2 0nm左右。显微硬度测试表明 :薄膜具有很高的硬度 ,而且随弧流比的变化 ,硬度值有一极大值。同时 ,本文探讨了 (TiCr)N薄膜的宏观残余应力、显微硬度和Cr含量之间的关系及其微观机制更多还原

【Abstract】 TiCr)N coatings have been successfally synthesized on high speed steel substrates by using arc ion plating.The compositions of coatings were controlled by adjusting the arc currents of spatially spearated pure Ti and Cr targets.X ray diffraction analyses show that the structures of (TiCr)N coatings are similar to that of TiN and no independent TiN or CrN phase has been found.The coatings are (220) texture and the lattice constant decreases with the increase of Cr concentration.Transmission electron microscopy observations show that the grain sizes of (TiCr)N coatings are about 20 nm.Microhardness measurements show that the hardness of coatings is higher than 32 GPa with Knoop’s indentorl.The hardness of coatings changes with the increase of Cr concentration and the maximum hardness 36 GPa appears at a Ti/Cr arc current ratio of 2 7.The relationship among residual stress,hardness,and Cr concentration of coatings and their mechanism are discussed.更多还原