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SrTiO₃斜切基片上外延生长YBa₂Cu₃O_7-δ薄膜的扫描探针显微镜研究

Direct Observation of Epitaxial Growth of YBa₂Cu₃O_7-δ Thin Films on SrTiO₃ （001） Vicinal Substrates by Scanning Probe Microscopy

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【Author】 Shi Dongxia 1,Ba Dechun 1,Pang Shijin 1,2 ,Hu Wenfei 3,Li Lin 3,Gao Hongjun 21 Institute of Mechanical Engineering and Automation,Northeast University,Shenyang,110004,China;2 Beijing Laboratory of Vacuum Physics,Institute of Physics & Cent

【机构】东北大学机械工程与自动化学院；中科院物理所和凝聚态物理中心北京真空物理开放实验室；中科院物理所超导国家重点实验室；中科院物理所和凝聚态物理中心北京真空物理开放实验室沈阳110004；沈阳110004；沈阳11000；

【摘要】采用激光脉冲沉积法在钛酸锶SrTiO3 (0 0 1)斜切基片上外延生长YBa2 Cu3 O7 δ薄膜 ,在大气环境下采用扫描探针显微镜对YBa2 Cu3 O7 δ薄膜的表面纳米形貌进行直接观察。发现YBa2 Cu3 O7 δ薄膜具有相对光滑的表面形貌 ,薄膜表面由沿SrTiO3台阶趋向外延生长的纳米台阶组成 ,薄膜生长模式主要以台阶媒体生长为主。更多还原

【Abstract】 Epitaxial growth of YBa 2Cu 3O 7 δ thin films on SrTiO 3 (001) vicinal substrates was prepared by pulse laser deposition SPM was used to observe the topography and structure of YBa 2Cu 3O 7 δ thin films in ambient condition.Smooth YBa 2Cu 3O 7 δ thin films with regular steps were directly observed.The growth mode was mainly the step flow growth along SrTiO 3 step edges.更多还原