【摘要】 采用激光Raman散射分析法对CVD金刚石膜的生长过程进行研究 ,讨论在金刚石膜生长的不同阶段 ,膜内金刚石和非金刚石成分的相对含量及其残余应力的变化情况更多还原

【Abstract】 Laser Raman analyes was carried out to investigate the growth process of CVD diamond films.By Raman spectroscopy,the variation of the relative contents of the diamond and non-diamond carbon phases was discussed,and the residual stresses in the diamond films at different growth stages were estimated.更多还原