【摘要】 综述了适合于电子行业用的无油机械真空泵的种类 ,介绍几种无油机械真空泵的结构、性能、特点和存在的问题 ,以及对泵的选择和应用。更多还原

【Abstract】 An overview of the types of oil free mechanical vacuum pumps suitable for electronic industry is introduced.The construction,function,features,existent problems,selection and application are described for all kinds of mechanical vacuum pumps of oil free.更多还原