【摘要】 文章介绍了凯泽斯劳滕大学新开发一种步进电动机驱动的四轴超精密机床的结构、工作原理及步进电动机控制系统。该机床具有纳米级运动精度 ,可以加工圆柱、球面及非球面等光学表面 ,表面粗糙度值小于 5nm。更多还原

【Abstract】 A newly developed ultra-precision machine tool with four stepper-motor-driven axes is introduced. The nano-metric accuracy of the moving axes allows producing geometries like cylinders, spheres and aspheres with optical quality. The machine structure, machining principle, control system of stepper motors are described in the text.更多还原