【摘要】 结合纳米硬度技术测量各类薄膜和块体材料表层的纳米压痕硬度、弹性模量、断裂韧性、膜厚、微结构的弯曲变形,采用纳米划痕硬度技术测量各类薄膜和块体材料的粗糙度、临界附着力、摩擦系数、划痕横剖面。纳米硬度计是检测材料表层微米乃至几十纳米力学性能的先进仪器,可广泛应用于表面工程中的质量检测。更多还原

【Abstract】 The rapid developments of surface engineering make progress in the measuring techniques for mechanical properties. This paper is specially focused on introducing measuring ways and results of Nano Indenter XP system made in MTS, such as elastic modulus, hardness , fracture toughness, film thickness, microbeam and microbridge deflection, surface roughness, critical load, friction coefficient, cross profilometry. Nano hardness techniques are the advanced ways for measuring mechanical properties of material surfaces from 103nm down to l01nm. So, it may be widely applied to quality assessment in the field of surface engineering.更多还原