【摘要】 在分析了当前制作微机电系统的几种技术的基础上 ,采用自由度较大的、制作复杂结构能力较强的光造型 (SL )技术。研究过程中在以下方面有所进展与创新 :STL文件纠错、CAD直接切片、固化单元研究、提出与传统机械设计不同的设计思想及方法等。为解决光造型技术在微系统的设计及加工过程中存在的问题提出了以下措施 :在微机电系统设计中采用虚拟现实技术 ;改进制造工艺以提高精度和速度 ;利用多种复合材料制作微零件 ;结合多种微细加工技术研究微系统整体制造工艺。更多还原

【Abstract】 Stereolithography, one of MEMS’ manufacturing technologies, is employed because of the freedom in design and fabrication, also the great capacity to build complex structure. Some difficulties have been already overcome e.g.diagnosis and modification of the STL file, direct slicing, solidified unit research on micro prototype, new design idea and method ,which are different from traditional machinery design.Some resolutions are provided to solve existing problems in the MEMS’ design and manufacturing process, such as,Virtual Reality Technology is applied into the MEMS’ design, some methods are put forward to get higher accuracy parts, compound materials are used to build MEMS, several micro fabrication technologies are combined to obtain the whole micro system.更多还原