【摘要】 用磁控溅射法在镍基单晶高温合金基体上沉积NiCrAlY涂层 ,研究了真空热处理对涂层组织结构及抗氧化性能的影响 .结果表明 ,溅射NiCrAlY涂层主要由γ -Ni和 β -NiAl两相组成 ,元素分布均匀 ;经真空热处理后 ,涂层主要由γ′-Ni3 Al、β -NiAl相和极少量的α-Al2 O3 相组成 ,元素分布变得不均匀 ,最外层富Al贫Cr .真空热处理可使溅射NiCrAlY涂层表面较早生成保护性能良好的α -Al2 O3 .10 0 0℃氧化 2 0 0h ,溅射涂层氧化膜有较大部分已经剥落 ,但真空热处理涂层的氧化膜仍较好地粘附在涂层基体上 .真空热处理使溅射NiCrAlY涂层表面生成的氧化膜粘附性更好 ,提高了溅射NiCrAlY涂层的抗氧化性能更多还原

【Abstract】 The influence of vacuum heat treatment on NiCrAlY coating,which was deposited on a Ni-base superalloy substrate by magnetron sputtering was investigated.It was shown that the sputtered NiCrAlY coating,which consisted of a two-phase mixture:γ-Ni and β-NiAl phase,had a homogeneous elemental distribution.After vacuum heat treatment,the sputtered NiCrAlY coating mainly consisted of γ′-Ni 3Al,β-NiAl,and trace of α-Al 2O 3 phases and the outermost layer of the sputtered NiCrAlY coating riched in Al and depleted in Cr.The sputtered NiCrAlY coating after vacuum heat treatment formed α-Al 2O 3 much earlier and the α-Al 2O 3 scale had a better adherence to the NiCrAlY coating.Therefore vacuum heat treatment improved the oxidation resistance of sputtered NiCrAlY coating.更多还原