【摘要】 介绍了非球表面三维形貌检测技术的新方法———相移莫尔测偏法的测量原理、图像评价方法和测量装置。详细说明了测量装置的光路和相移器的设计原理及方法 ,对测量误差的来源进行了分析。为了检验该技术测量非球表面的精度、速度和稳定性 ,用干涉法对同一非球表面进行了光学测量比较。实验结果表明 ,该技术是一种测量精度高、抗干扰能力强、稳定性高且速度快的在线检测方法。更多还原

【Abstract】 This paper desciribed the measurement principle,algorithm for evaluating moiré deflectogram and error source of the new method.The devic designed on the method could automatically perform the measurement of aspheric surfaces.In this work,measurements of the same aspheric surface with two different methods were made:one with the interferometry,the other the moiré deflectometry.The comparison between the two measured results indicates that the method described in the paper is a highly precise,robust and on-line quick technique.更多还原