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界面微分电容法单晶硅表面单分子膜质量的检测
Interfacial Differential Capacity Analysis for Evaluation of the Monolayers on Crystalline Silicon Surface
【摘要】 用界面电容分析法 ,研究了影响烯烃类分子在氢结尾的硅 (1 1 1 )表面上通过 Si— C键嫁接有机单分子膜的某些因素和有机单分子膜对硅表面氧化的钝化作用 .指出嫁接反应条件或嫁接分子的反应活性的差异都会影响所形成的单分子膜的质量 ;在所选择的反应条件下 ,由于烯烃修饰的硅表面上嫁接分子所占的体积分数约为 0 .90 ,故只能对硅表面的氧化产生有限的钝化作用 .另外 ,系统测量了不同链长的烯烃分子形成的有机单分子膜的电容特性参数
【Abstract】 The factors influenting the formation of organic monolayers derived by alkenes on hydrogen termined silicon(111) and the passivation of the monolayer covered surface toward oxidation have been investigated preliminarily by using interfacial differential capacity analysis. The results demonstrated that the both reaction conditions and reactivity of the grafting molecules could affect the quality of the monolayers. In the conditions selected where the volume fraction of the grafted molecules was about 90% on the surface modified by alkenes, only limited passivation of monolayers toward oxidation was observed. The parameters of capacity properties of the organic monolayers formed with a series of alkene molecules on silicon(111) surface were also meassured.
【Key words】 silicon surface; organic graft monolayer; interfacial differential capacity analysis;
- 【文献出处】 应用化学 ,Chinese Journal of Applied Chemistry , 编辑部邮箱 ,2002年06期
- 【分类号】O646
- 【被引频次】1
- 【下载频次】135