【摘要】 涉及到一种基于 PSD原理的高精度三维轮廓测量仪。X— Y工作台采用了宏驱动与微驱动相结合的工作方式。宏工作台采用步进电机驱动 ,进给精度达 1微米 ;微工作台采用精密压电陶瓷驱动 ,进给精度最小可达 1纳米。这样 ,使得 X— Y测量步距达到 1纳米的条件下 ,测量物件的尺寸范围可以扩大为 2 0 mm× 2 0 m m,不仅适合微小构件的精密测量 ,而且适合较大器件的精密测量 ,且 X— Y方向的位移测量精度最小可达 1纳米。Z方向位移传感器采用激光单点位置探测器 PSD,Z轴方向的位移测量精度达 10纳米。对微轮廓测量仪的控制系统作了程序设计 ,得到了较满意的效果更多还原

【Abstract】 Based on PSD principle a high precision 3D profiler is presented.XY tables adopt combining macrodriving with microdriving.The macrotable uses step motor,the resolution of step is a micron and the microtable is driven by piezoelectricity ceramics,its resolution of step is 1 nm.So under the condition of 1 nm of displacement,the measurement of object can enlarge to 20mm X 20mm,it is not only fit for precision measurement of microcomponent,but also fit for precision measurement of relative bigger component,the resolution of displacement of XY axis is 1 nm.The displacement sensor of Z axis adopts single point laser position detector PSD,and its resolution is about 10nm.The procedure of whole control system is programmed with Visual Basic6 0,and get a better result.更多还原