【摘要】 在对单表面分流四边形电极结构二维 PSD的非线性及失真进行理论分析的基础上 [1 ] ,从理论上计算得到了这种结构 PSD的位置修正因子 ,并提出了一种对这种结构 PSD的位置非线性进行修正的方法。初步实验取得了非常满意的结果 :经过修正后 ,在较大尺寸 (13mm× 13mm)器件上实现了 6 0 %光敏面范围内的位置非线性均方根误差 0 .15 % ,位置检测均方根误差从原来的±10 10μm减小到± 2 0μm。最大误差从± 15 0 0μm下降到± 5 0μm。由于进行了归一化处理 ,该方法适用于这种结构不同尺寸的 PSD,特别具有实用意义。更多还原

【Abstract】 The electric field distribution and current output of single side tetra lateral two dimensional position sensitive detector (PSD) were analyzed and calculated theoretically in our previous paper According to these results,the position correctional factor of this type of PSD was obtained theoretically,a method to enhance the linearity of this type of PSD effectively was propounded The primary experimental result was satisfied after correcting In the 60% range of a 13mm×13mm active area,the position non linearity(rms)was 0 15%.The position error(rms) was down from ±1010μm to ±20μm,the maximal position error was down from ±1500μm to ±50μm Being normalized,this method was fit for tetra lateral two dimensional PSD of any dimension更多还原