【摘要】 介绍了反射式激光莫尔信号特性和差动式精密定位方法 ,用实验验证了反射式激光莫尔信号特性的实验测定结果与理论计算结果的一致性。给出了差动式精密定位控制方法的高精度定位实验结果更多还原

【Abstract】 This article introduces sensing characteristics of reflection type of laser moiré signals and principle of the differential moiré method. The calculated results of the moiré signals are compared with the experimental results. Good agreements are obtained between these results. It gives the experimental result of high alignment accuracy by using differential precision positioning.更多还原