【摘要】 采用溶胶 -凝胶法在普通玻璃载片上制备了Al2 O3 薄膜 .通过XRD ,DSC -TGA以及椭圆偏振测厚仪等测量手段研究了勃姆石溶胶的制备条件 ,氧化铝薄膜的光学参数以及勃姆石凝胶在热处理过程中的物理变化 .结果表明 :异丙醇铝的浓度、水解温度和胶溶剂的加入量直接影响了勃母石溶胶的稳定性 .45 0℃热处理所得薄膜单层厚度为 31.3nm ,折射率为 1.72 ,表面均匀 ,透光性好更多还原

【Abstract】 Al 2O 3 thin film were prepared on slide glass substrates by sol gel method.The influences of preparing conditions on sol stability,refractive index and thickness of thin film,gel physical changes during heat treated were investigated by using elliptic polariscope,XRD,DSC-TGA.Study indicated:the best preparing conditions of sol is 0.6～0.9?mol/L (Al 3+ ),pH=6-7,70-95℃.Refractive index and thickness of Al 2O 3 thin film heat treated at 450℃ are 1.72 and 31.3?nm.更多还原