【摘要】 提出测定单晶硅片温度的拉曼散射光谱法 .选择硅的 5 2 0cm-1散射带进行观测 ,分别记录下它的stokes和anti-stokes散射分量的强度 ,计算得到了硅表面激光焦斑处的温度 ,多次测定结果甚为一致 ,表明非接触拉曼光谱测定温度可与硅晶体结构的拉曼光谱研究同时进行 ,拉曼光谱测温法具有一定的实用性和普遍意义 .更多还原

【Abstract】 A method of determination the temperature of monocrystalline silicon with Raman spectrum is raised.We observed 520?cm -1 scattering band of monocrystalline silicon,got the intensities of its stokes and anti-stokes scattering and calculated the temperature of focal point in the surface of monocrystalline silicon.The results of many tests show no difference.This work indicates that the contactless measurement of temperature with Raman spectrum can be carried on at the same time with the study of crystal structure of silicon and this method is practicable and of universal significance.更多还原