【摘要】 研究了一种新型真空微电子氢气传感器 ,其原理为气体在高电压激发下发射出与其吸收光谱相同的特征光谱。用微机械加工方法在硅片上加工出密封的充满H2 的微气室 ,在一定电压下阴极发射电子 ,气体分子被电离 ,发射特征光谱。当外界H2 存在时 ,会吸收特征光谱 ,这一吸收具有高选择性。微气室中微机械加工出纳米尺寸冷阴极硅尖端 ,在低电压下就可以产生场发射。检测器可以使用普通的光电二极管。更多还原

【Abstract】 Research directed toward the realization of vacuum microelectronic hydrogen sensor.The device is based upon the fact that the ionized plasma of a gas fundamentally radiates the same unique characteristic optical frequencies (UV,Visible,IR) which it absorbs.Thus a sealed micromachined hydrogen filled gas microtube in a silicon chip should serve,with some minor filtering,as a source of radiation which will only be externally attenuated when hydrogen gas molecules absorb this "multi-monochromatic" light.Plasma breakdown in the microtube is achieved by micromachining an essentially atomically perfect point,which allows electron tunneling or cold cathode emission,at low volt of applied potential.Detection is by an ordinary integrated silicon diode which needs not to be selective.更多还原