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场发射阵列发射性能下降机制分析
Analysis on Degradation Mechanism in Emission Current of Field-emitter Array
【摘要】 场发射阵列 (FEA)发射性能的下降是场发射显示 (FED)研究中普遍遇到的一个问题 ,研究FEA发射性能下降的机制对于推进FED进展具有重要意义。阴极氧化、溅射损伤和离子注入是目前提出的三种解释。对这三种解释进行了进一步的分析和讨论 ,认为目前的实验工作还不足以充分说明哪种机制在FEA发射性能下降中占据主导地位 ,并提出了进一步的实验研究的方向和内容
【Abstract】 Degradation in the emission current of field-emitter array (FEA) is a major obstacle to the successful commercialization of field emission display (FED). Three primary explanations are given to explain the degradation mechanism of FEA. They are FEA oxidation, sputtering damage and ion implantation. These three explanations are analyzed and discussed in the paper. We think that neither explanation could give necessary proofs to explain it completely. More experiments are needed and the direction and content of these experiments are advised.
- 【文献出处】 微细加工技术 ,Microfabrication Technology , 编辑部邮箱 ,2002年03期
- 【分类号】TN102
- 【被引频次】12
- 【下载频次】64