【摘要】 用射频反应溅射制备了FeTaN纳米晶软磁薄膜 .研究了薄膜结构和磁性与制备条件的依赖关系 .研究发现 ,当Ta的含量较高时 ,在N2 +Ar混合气氛中易形成沉积态薄膜的非晶结构 .适当的热处理后 ,α Fe纳米晶从中晶化生成 .薄膜显示出优良的软磁特性更多还原

【Abstract】 The nanocrystalline FeTaN soft magnetic thin films were prepared by RF\|reactive sputtering, and their microstructure and magnetic properties were investigated. It is found that the as\|deposited films would be amorphous if the concentration of Ta is high in the films. After proper annealing, the nanocrystalline of α Fe crystallizes from the amorphous matrix, and the films exhibit excellent soft magnetic properties.更多还原