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直流磁控溅射一步法原位制备MgB₂超导薄膜

Single-step in-situ preparation of magnesium diboride superconducting thin films by dc magnetron sputtering

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【作者】马平；刘乐园；张升原；王昕；谢飞翔；邓鹏；聂瑞娟；王守证；戴远东；王福仁；

【Author】 Ma Ping Liu Le-Yuan Zhang Sheng-Yuan Wang Xin Xie Fei-Xiang Deng PengNie Rui-Juan Wang Shou-Zheng Dai Yuan-Dong Wang Fu-Ren(Mesoscopic Physics National Laboratory and Department of Physics,Peking University,Beijing 100871,China)

【机构】人工微结构和介观物理国家重点实验室；人工微结构；

【摘要】用MgB2 靶 ,控制直流磁控溅射工作在异常辉光放电或弧光放电状态 ,在SrTiO3 衬底上原位一次性得到了MgB2 超导薄膜 ,其起始转变温度为 32K ,零电阻温度为 15K .更多还原

【Abstract】 In a single-step in-situ procedure,the superconducting MgB 2 (101) highly oriented thin films have been successfully grown on the SrTiO 3 (100) substrates by using the synthesised MgB 2 target and controlling the magetron sputtering working at the state of abnormal glow discharge or arc discharge.The fillms have a zero resistance transition temperature of 15K and an onset transition temperature of 33K.更多还原