【摘要】 采用溶胶 凝胶法成功制备了三氧化钼 (MoO3)薄膜 .首先 ,以CH3COCH2 COCH3,MoO3,C6 H5CH3和HOCH2 CH2 OCH3为原料合成三氧化钼溶胶和凝胶 .凝胶的热重和差热分析 (TG DTA)显示三氧化钼的晶化出现在5 0 8℃附近的 14 0℃范围内 .其次 ,利用旋转涂布法在硅 (111)基片上通过 4 5 0℃退火处理制备了三氧化钼薄膜 .XRD和FTIR谱表明薄膜为α MoO3相 .SEM形貌像显示薄膜中晶粒分布均匀致密 ,在基片表面无择优取向 ;晶粒尺度范围在 0 .5～ 1μm之间 .更多还原

【Abstract】 A sol\|gel process was presented to prepare molybdenum oxide thin films. Molybdenum acetylacetonate sol\|gel was made by employing the system CH 3 COCH 2 COCH 3 /MoO 3 /C 6 H 5 CH 3 /HOCH 2 CH 2 OCH 3 . Thermal gravimetry and differential thermal analyses (TG\|DTA) on gel suggest that MoO 3 crystallize around 508 ℃ covering a range of 140 ℃. MoO 3 films were prepared on Si(111) substrates by spin coated method in oxygen environment at 450 ℃. X\|ray diffraction (XRD) and FTIR spectra for as\|prepared film confirm that MoO 3 films are α\|MoO 3 phase. SEM investigations show that random\|oriented and densely packed MoO 3 grains films have been obtained and the longitudinal dimension of crystallites is between 0.5 to 1 μm.更多还原