【摘要】 本文使用导体截面矩量法提取芯片内互连线电阻和电感频变分布参数。根据芯片内多接地导体的情况重新推导了公式 ,实现了对算法的改进。研究了硅衬底导电率变化对金属绝缘半导体传输线的分布电阻和分布电感参数的影响。通过两个例子的计算 ,证明算法可应用于芯片内互连线参数提取。更多还原

【Abstract】 Conductor cross-section method of moment is applied in extracting resistance and inductance frequency-dependent distributed parameter of IC interconnects. The method is amended when there are multiple current return paths. Examples are given to illustrate that the change of silicon substrate conductivity affects distributed parameters of MIS transmission line. The results show that the method can be applied in on-chip interconnects parameter extraction.更多还原