节点文献
真空气相沉积制备碲化镉薄膜的电学和光学特性
INVESTIGATION ON THE ELECTRICAL AND OPTICAL PROPERTIES OF THE CdTe THIN FILM
【摘要】 用真空气相沉积法 ,同时蒸发Cd和Te材料 ,在玻璃衬底上沉积CdTe薄膜。对CdTe薄膜掺杂In ,并用氮气作保护气体 ,在不同温度和时间下对薄膜进行热处理 ,研究薄膜的电学特性和光学特性。结果表明 ,用真空气相沉积法制备的CdTe薄膜的电学、光学特性和由其他方法制备的CdTe薄膜的电学和光学特性基本一致
【Abstract】 The CdTe thin films are deposited on the substrate of glass by the method of evaporating simultaneously Cd+Te mixture using molybdenum boat in the vacuum chamber. The films are doped in dium in the Cd+Te mixtures and are heat treated in N 2,at the different temperature and time.The electrical and optical properties of the CdTe thin film are investigated. Result showed that this CdTe film has the properties similiar to that of the films prepared by other technologies.
【关键词】 CdTe薄膜;
真空气相沉积;
掺杂In;
热处理;
电学和光学特性;
【Key words】 CdTe thin film; vacuum vapor deposition; doping In; heat treatment; electrical and optical properties;
【Key words】 CdTe thin film; vacuum vapor deposition; doping In; heat treatment; electrical and optical properties;
【基金】 国家自然科学基金资助项目 (695 60 0 1)
- 【文献出处】 太阳能学报 ,Acta Energiae Solaris Sinica , 编辑部邮箱 ,2002年02期
- 【分类号】TB383
- 【被引频次】3
- 【下载频次】268