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太阳电池用直拉硅单晶中碳对氧沉淀的作用
EFFECT OF CARBON ON OXYGEN PRECIPITAION IN CZOCHRALSKI SILICON(CZ-Si) FOR SOLAR CELLS
【摘要】 主要通过单步退火、二步退火的方法 ,借助于红外光谱仪 ,研究了太阳电池用直拉硅单晶中碳对氧沉淀的作用 ,发现碳在单步退火过程中不参与氧沉淀 ;经过预处理的太阳电池用硅单晶尾部 (高碳区 )样片在 95 0℃和 10 5 0℃第二步退火时碳参与了氧沉淀的长大。二步退火过程中尾部 (高碳区 )样片产生的氧沉淀较头部 (低碳区 )多 (除了85 0℃以外 ) ,由此可以推断原生碳含量越高 ,就越能促进氧沉淀。
【Abstract】 By means of one step annealing and two step annealing, the effect of carbon on oxygen precipitation in CZ Si for solar cells(S CZ Si) has been studied.It is found that the carbon atoms are not involved in the formation of oxygen precipitate nuclei during one step annealing.But after pretreatment,as for the tang end samples,the carbon atoms can participate in the growth of oxygen precipitates during the subsequent heat treatments at 950℃ and 1050℃. After two step annealing,the precipitated oxygen in tang end samples are more than those in seed end samples (except those with the subsequent 850℃ heat treatment ),indicating that high carbon content can enhance oxygen precipitation.
- 【文献出处】 太阳能学报 ,Acta Energiae Solaris Sinica , 编辑部邮箱 ,2002年02期
- 【分类号】TM914
- 【被引频次】9
- 【下载频次】200