【摘要】 从等离子体波动方程和动力学方程出发,利用解析方法,讨论电感耦合RF放电等离子体的电流特性和衰减机制.发现只有当等离子体波的波速低到与等离子体内能量较高一部分电子轴向运动速度相当时,等离子体和波相互作用才能在衰减机制中居主导地位.更多还原

【Abstract】 From plasma wave equations and plasma kinetic equation, we analytically discussed the characteristic of current in an inductive coupled RF plasma and their damping mechanism. It is found that when phase velocities of the plasma waves slow down to close to the axial thermal velocities of part of higher energy electrons,the interaction between waves and plasma then dominates the damping mechanism.更多还原