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基于等厚干涉的轴向空间相干度分析及其在表面形状测量中的可行性探讨(英文)

Longitudinal Spatial Coherence Analysis Based on the Interpretation of the Fringes of Equal Thickness and its Practical Application for the Surface Profilometry

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【作者】段志辉； Golkher Mark； Joseph Rosen；小琦宽和；石进信生；武田光夫；张青川；

【Author】 Zhihui Duan1, Golkher Mark3, Joseph Rosen3, Hirokazu Kozaki2,Nobuo Ishii2, Mitsuo Takeda2, Qingchuan Zhang1(1. Laboratory of PhotoMechanics,Department of Mechanics and Mechanical Engineering,University of Science and Technology of China,Hefei, Anhui, 230037, China;2. Laboratory for Information Photonics and Wave Signal Processing,Department of Information and Communication Engineering, The University of ElectroCommunications,151 Chofugaoka, Chofu, Tokyo, 1828585, Japan3. Department of Electrical and Computer Engineering,BenGurion University of the Negev, Israel,Negev P. O. Box 653, BeerSheva 84105, Israel)

【机构】中国科学技术大学力学和机械工程系； Department of Electrical and Computer Engineering； Ben-Gurion University of the Negev； Laboratory for Information Photonics and Wave Signal Processing； Department of Information and Communication Engineering； The University of Electro-Communications；中国科学技术大学力学和机械工程系合肥230027； Israel； Negev P. O. Box 653； Beer-Sheva 84105； Israel； 1-5-1 Chofugaoka； Chofu； Tokyo； 182-8585； Japan；合肥230027；

【摘要】从等厚干涉的解释出发,推导出了二维空间的相干方程.基于空间相干方程,利用SLM产生了一个新的空间非相干光源.同时提出了新的相移方案,并结合这个新的相移方案,实现了轴向空间距离的探测和干涉条纹的相移.分析了空间方向角对相干方程的影响,并给出了实验验证.通过对非相干光源的参数和特定的空间距离以及空间方向角的匹配,重建了一个具有标准段差的实际物体的表面形状.为光学表面形状测量提供了新的思路.更多还原

【Abstract】 Based on the interpretation for the fringes of equal thickness, we proposed the two dimensional longitudinal spatial coherence function. By manipulating the irradiance of an extended quasimonochromatic spatially incoherent source with a spatial light modulator, we generated a special optical field that exhibits high coherence selectively for a specified location along the optical propagation axis and a specified inclination between the two mirrors. We proved the feasibility of the proposed principle for the application through measuring a real object with the standard step. In particular, we proposed a new phase shift technique without mechanical movement. The quantitative experimental proof of the principle is presented.更多还原

【关键词】表面形状测量；轴向空间相干度；等厚干涉；空间非相干光源；空间光调制器；空间方向角；相移；
【Key words】 profilometry； longitudinal spatial coherence； the fringes of equal thickness； extended quasi-monochromatic spatially incoherent source； spatial light modulator； standard step； specified inclination； new phase shift technique；

【文献出处】实验力学 ,Journal of Experimental Mechanics , 编辑部邮箱 ,2002年04期

【分类号】O343
【下载频次】60

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