【摘要】 阐述了电容法的基本原理 ,重点利用电磁场三维有限元法对电容传感器进行优化设计 ,并设计了低的零点漂移 ,稳定的灵敏度 ,能抗杂散电容、抗干扰的测量电路 .很好地解决被测流体流型影响测量结果的问题更多还原

【Abstract】 The paper describes the basic principle of capacitance measurement method. By using three dimension finite element method, we design the suitable capacitance sensor and the measurement circuit which have low zero drift, stable sensitivity, anti jamming and anti disturbance. The measurement system solves the problem that the flow pattern to be measured of the fluid influences the measuring result.更多还原