【摘要】 以氢气为主要反应气体生长的CVD金刚石膜的晶粒尺寸过大限制了它在某些领域的进一步应用。当晶粒组成降到纳米级时 ,金刚石膜会表现出许多优异的性能 ,具有广阔的应用前景。与通常的CVD法生长金刚石的工艺不同 ,氩气在纳米金刚石的生长过程中发挥着重要作用。纳米金刚石的鉴定和评价是纳米金刚石研究中的重要部分更多还原

【Abstract】 When crystallite size of CVD diamond films is controlled to nano level,diamond films exhibit some outstanding features compared with microcrystalline diamond films in terms of physical and chemical aspects. Not similar to conventional MPCVD method(microwave plasma chemical vapor deposition)for diamond growth,Ar is the main precursor and plays a very important role.Identification and evaluation methods for this material are equally important.Because of nanocrystalline diamond’s excellent properties,it has many potential applications:micro-machines and other tiny devices,cutting tools,flat panel displays,SAW(surface acoustic wave)devices,conformal coatings and electrochemical electrodes.更多还原