【摘要】 含有多传感器的微机电系统在组装传感器时,一般存在着轴对准问题,轴的非对准误差能导致很大的系统测量误差。为此提出一种基于光对准的误差补偿方法,可以在不需要高精度轴对准的前提下,对装配后的组件进行后续误差检测和实时补偿,有效地消除装配误差对测量精度的影响。将该方法实施于微机电方位水平仪,用以测量姿态,通过仿真结果证实了方法的有效性。更多还原

【Abstract】 Axismisalignment problems occur when multiple sensors are assembled into a microelectromechanical system. The axes misalignment inevitably induces large measurement errors. The problem is solved using an error compensation method based on optical alignment. The method does not require improved assembly accuracy, but uses error postsurveying and online compensation to eliminate assembly errors. Results of simulations conducted with a microelectromechanical azimuthlevel detector prove the validity of the method.更多还原