【摘要】 提出了用于测量加工表面微观轮廓高度的高频亮度调制、同源频率合成、软件鉴相的激光相位微距测量方法 ,提出了开放式PC系统结构。介绍了机械加工表面微观形貌激光测量评价仪的原理、测量电路设计与数字信号处理软件设计。该方法具有分辨率高、动态响应快、评价指标参数多样且可扩充等特点。更多还原

【Abstract】 Inthis paper,the measurementmethod ofhighfrequencybrightness modulation laser phase for mechanic surface microˉcosmic appearance is put forward.The principles,open system structure,measurement circuits and software design are disˉcussed.It is indicated that this method has high resolution ratio,rapid dynamic response and multiple expansible parameters of evaluation.更多还原