【摘要】 介绍了俄歇电子谱术的某些基本问题。内容包括 :俄歇电子发射 ,表面灵敏性 ,俄歇电子谱的测量 ,定性和定量分析 ,深度剖析等。最后介绍了三种俄歇谱仪的功能扩展 ,功函数测量 ,材料结构性能测量和电子态密度测量更多还原

【Abstract】 Some fundamental aspects of Auger electron spectroscopy have been reviewed. The content of this article includes Auger electron emission, surface sensitivity, measurement of Auger electron spectrum, qualitative and quantitative analysis, depth profile etc. The functional extension of Auger electron spectroscopy are also described briefly.更多还原