【摘要】 根据“在低加速电压下 ,电子束在样品中产生的扩散区小”的原理 ,对各类样品做了一些实验性的研究工作 ,结果发现 :在 7 5kV加速电压下 ,对导电性差的样品做形貌分析时 ,避免了在 2 0kV加速电压下样品的充、放电现象 ,提高了图像的分辨率 ,可改善图像质量 ;对几微米的细小颗粒做定性分析时 ,克服了在 2 0kV加速电压下分析区域之外所含元素的X射线的干扰 ,易于得出正确结论 ;在高倍下做元素的线扫描、面分布时 ,由于扩散区小 ,所得的特征X射线像边界清晰、视觉效果好。更多还原

【Abstract】 According to the principle of which a small diffusion area in a specimen is produced by an electron beam under low acceleration voltage, some experiments were done on all kinds of specimen. The experimental results show that the charging or/and discharging phenomenon of the specimen under 20kV acceleration voltage can be avoided while the analysis on the morphology of a poor-conductive specimen is carried out at 7.5kV acceleration voltage, improving the resolution and quality of images. The disturbance of X-ray to the elements out of the area to be analyzed under 20kV acceleration voltage can be surmounted when the qualitative analysis on the micron-level micro-particles is made, thus a correct conclusion being gotten easily. Owing to small diffusion area, the special X-xay images have clear phase boundary and good visual effect when line scanning and mapping images of elements are made in high magnification.更多还原