【摘要】 现代半导体洁净室中,生产过程所产生的有机挥发物(VOC)已成为影响产品品质的关键问题之一。本文对洁净室里VOC的来源进行了分析,并对人体和洁净室结构材料产生的VOC的特性和测量方法进行了讨论。更多还原

【Abstract】 In modern semiconductor industry, volatile organic compounds (VOC) generated during producing process have become one of key problems which affect on product qualities. We analyze the sources of VOC generation in a cleanroom and discuss the behavior and measurement method of VOC generated by human body and cleanroom construction materials in this article.更多还原