【摘要】 讨论了Ｔａ表面等离子体渗氮的热力学问题，将超平衡氢和非平衡热力学的反应耦合理论引入离子渗氮反应的计算，从理论上解释了等离子体和氢在 Ｔａ表面渗氮过程中的作用 ，给出了渗氮条件下的 Ｔａ—Ｎ—Ｏ非平衡定态相图，与实验验结果符合得较好．实验表明，氢和等离子体的存在，有利于提高氮原子的活度，促进热力学上不稳定的Ｔａ的氮化物的形成，抑制粗糙的Ｔａ的氧化物的形成．更多还原

【Abstract】 The thermodynamic aspects involved in plasma nitriding of tantalum were discussed. The concept of super-equilibrium hydrogen and theory of reaction-coupling in non-equilibrium condi- tions were introduced into the calculation of surface reactions during plasma nitriding of tantalum, and used to explain theoretically the effects of hydrogen and plasma on the process of nitriding of tantalum. The partial non-equilibrium diagram of Ta-N-O under the conditions of nitriding was given, which is in agreement with the experimental results. The experimental results also show that the existence of hydrogen and plasma is useful to form tantalum nitrides other than tantalum oxides by elevating the activity of nitrogen atoms.更多还原