【摘要】 介绍溶胶 -凝胶法制备PZT铁电薄膜的工艺过程 ,探讨影响稳定溶胶配制的原材料、溶剂及溶液的 pH值选取 分析催化剂和添加剂在提高薄膜质量方面的作用机理 ,理论上阐述了基片和PbTiO3过渡层对促进PZT薄膜晶化的影响 提出优化溶胶 -凝胶技术的关键措施 利用优化工艺对采用无机盐硝酸锆 ,通过甩胶沉积在α Al2 O3基片上的PZT薄膜的微观表面形貌和相结构进行了观察更多还原

【Abstract】 The procedure of sol gel processing for preparing PZT ferroelectric thin film are inrtoduced in the paper. The selection of raw materials, solution pH value is discussed,which has an effect on the preparation of stable sol. The working mechanism of catalysts and additives in improving the quality of thin film is analysized.The influence of substrates and the promoting effects of an intermediate layer PbTiO 3 on the crystallinity of PZT thin film are expounded theoretically,and the key technologies to optimize sol gel technique are proposed.On the basis of the modified sol gel technique,the micromorphologies and phase structure of PZT thin films are observed which are fabricated on α Al 2O 3 substrates using spin coating and inorganic salt zirconium nitrate.更多还原