【摘要】 本文介绍了一种能显著提高测量速度的光寻址电位传感器 (LAPS)。用多个光源同时激发LAPS,每个光源都采用不同的调制频率 ,对产生的光电流进行分析就可以得到所有激发区域的表面电位分布图。本文提出的方法得到被测气体完整的电位响应分布图象 ,其速度比现有方法有很大提高。本文证明了该方法的可行性并给出了相应的实验结果更多还原

【Abstract】 A method which can significantly increase the measurement rate of the light addressable potentiometric sensor (LAPS) is suggested. By illuminating the LAPS simultaneously at several positions, of which each is illuminated with a light pointer modulated with a different frequency, the surface potential at all illuminated regions can be measured simultaneously by analyzing the resulting photocurrent. Using this method, the rate to obtain a complete image of the surface potential distribution across a LAPS wafer can be drastically increased compared to the conventional mode, in which images are obtained by scanning the surface with one single light pointer. The technical feasibility of such a device is discussed and test measurements are presented.更多还原