【摘要】 提出了一种带有反馈系统的半导体激光正弦相位调制干涉仪。该干涉仪可以实现对微小振动的高精度实时测量。通过一个简单的信号处理系统对干涉信号进行分析 ,获得实际振动的振幅和频率。由于引入反馈系统 ,减低了测量误差 ,排除了环境噪声的影响。给出了具体的理论分析和实验结果更多还原

【Abstract】 A laser diode interferometer with a feedback control system for micro vibration measurement is proposed. The interferometer can be used to measure micro vibration of an object with high accuracy in real time. The interference signal is processed with a simple signal processing system and the amplitude and frequency of the vibration are obtained. The measurement errors are decreased with a feedback system. The theoretical analysis and experimental results are given.更多还原