【摘要】 利用CO2 激光 (λ =10 .6 μm)作为诱导光源 ,普通玻璃作为衬底 ,研究了影响激光沉积质量和速率的因素 ,探讨了激光诱导液相化学沉积技术的反应机制 ,反应产物及其沉积模型等。采用光学显微镜对其沉积过程和沉积铜的微观形貌进行了观察。结果表明 :激光诱导液相化学沉积技术能沉积出表面平整 ,颗粒大小均匀、规则 ,分布致密的铜镀层 ,且沉积速率比起普通化学镀也要高出几个数量级。更多还原

【Abstract】 In this paper,a sealed CO₂ laser（λ=10.6μm）beam was focused on a common glass surface through a l-mm-thick solution layer.The influence factors of laser deposition quality and rate are studied,and the reaction principles,possible reaction products and deposition models of laser-induced chemical liquid deposition are discussed.The course of deposition and micrograph of deposit copper are characterized by optical microscope.The results show that a good deposition layer can be deposited by laser-induced chemical liquid deposition（LCLD）,such as the smooth surface,the regular shape and size,the even and compact distribution,and a much higher deposition rate,etc.更多还原