【摘要】 系统分析了具有代表性的半导体薄膜热导率测试结构的模型、结构特点、测量方法及不足 ;对表面加工和CMOS工艺 ,需要进行测试结构的合理设计和提高薄膜热导率测量的精确度更多还原

【Abstract】 Test structure for thermal conductivity of MEMS thin films is systematically introduced,the feature of measurement structure,modelling and measurement method are analyzed.Their shortcoming are also pointed out.To meet the needs of surface micromachining and CMOS process,reasonable test structures and their improvements for measuring thermal conductivity of the MEMS thin films are required.更多还原