【摘要】 借助于基片下方放置的磁铁 ,在溅射的放电空间中引入了纵向的梯度磁场 .辉光放电时 ,其外貌发生了显著的收缩 ,由此沉积的薄膜在平面内存在明显的厚度梯度 .用磁场中带电粒子的运动理论解释了此种薄膜的形成机制更多还原

【Abstract】 A longitudinal gradient magnetic field was introduced into the discharge space by placing a permanent magnet under the substrate. The configuration of the glow clearly contracted in this case. And a great thickness gradient in the film plane was detected by measuring the thickness of the film. The authors interpreted such mechanism with the motion theory of charged particles in magnet field.更多还原