【摘要】 对用于 MOCVD法生长铁电氧化物薄膜的金属 β-二酮化合物的制备、结构及性质进行了评述 ,对它们在生长铁电薄膜中的应用现状进行了介绍 ,并对它们的应用前景作了展望。更多还原

【Abstract】 The preparation of volatile metal β-diketonates used as precursors for deposition of the ferroelectric oxide thin films is reviewed. The structures and properties of them are presented and discussed. The use of them in metal organic vapor deposition of ferroelectric oxide thin films is also discussed.更多还原