【摘要】 引入了一个分析红外光学薄膜热应变效应的模型 ,并针对具体情况 ,对模型作了必要的改进。应用新模型对高温淀积薄膜的冷却过程进行了模拟计算 ,得出了冷却后薄膜平均折射率与多个薄膜工艺和材料参数的关系 ,并对模拟结果作了相应的比较分析。更多还原

【Abstract】 A model to analyze the effect of thermal strain in the infrared optical films was introduced. When apply it to specific case, a necessary improvement has made on it. The calculation based on the new model to simulate the cooling of films which deposit at high temperature reveal the relations between the averaged refractive index of the films after cooling with some technical and material parameters. All these result has been analyzed and discussed deeply.更多还原